NEMS—emerging products and applications of nano-electromechanical systems

Surface Acoustic Waves and Nano–Electromechanical Systems

Full counting statistics of nano-electromechanical systems

– We develop a theory for the full counting statistics (FCS) for a class of nanoelectromechanical systems (NEMS), describable by a Markovian generalized master equation. The theory is applied to two specific examples of current interest: vibrating C60 molecules and quantum shuttles. We report a numerical evaluation of the first three cumulants for the C60-setup; for the quantum shuttle we use t...

performance of micro-electromechanical systems devices for space applications

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Heterogeneous 3D Integration and Packaging Technologies for Nano-Electromechanical Systems

Three-dimensional (3D) integration of microand nano-electromechanical systems (MEMS/NEMS) with integrated circuits (ICs) is an emerging technology that offers great advantages over conventional state-of-the-art microelectronics. MEMS and NEMS are most commonly employed as sensor and actuator components that enable a vast array of functionalities typically not attainable by conventional ICs. 3D ...

Micro- and nano-electromechanical systems for [bio]molecular analysis

[Bio]chemical sensors, defined as devices which convert a chemical state into an electrical signal [1], have been the subject of a strong development during the past few decades. A sensor has essentially two parts (Fig. 1): a detecting element, in which the presence of an external stimulus produces a change of some property (optical, mechanical, electrical ...), and a transducing element, which...